Tiv thaiv
Lub sensor resistive yog ib qho khoom siv uas hloov cov ntsuas lub cev xws li hloov chaw, deformation, quab yuam, acceleration, av noo, kub, thiab lwm yam. Muaj cov khoom siv hluav taws xob ntau, hom piezoresistive, thermal resistance, thermal, gas rhiab, noo noo rhiab thiab lwm yam khoom siv tiv thaiv.
Resistive strain gauge
Cov ntsuas ntsuas qhov ntsuas hauv lub ntsuas ntsuas muaj cov nyhuv hlau, piv txwv li, kev hloov kho tshuab tshwm sim nyob rau hauv qhov kev txiav txim ntawm lub zog sab nraud, kom tus nqi kuj hloov raws li. Muaj ob lub ntsiab ntawm cov kab ntsuas kev tiv thaiv kab mob: hlau thiab semiconductor, thiab hlau strain gauges muab faib ua hom hlau, hom ntawv ci thiab nyias zaj duab xis. Semiconductor strain gauges muaj qhov zoo ntawm qhov siab rhiab heev (feem ntau yog kaum ob lub sij hawm ntawm cov hlau thiab ntawv ci hom) thiab cov nyhuv transverse me me.
Piezoresistive
Piezoresistive sensors yog cov cuab yeej tsim los ntawm kev tawm tsam ntawm lub substrate ntawm cov khoom siv semiconductor raws li cov nyhuv piezoresistive ntawm cov khoom siv semiconductor. Lub substrate tuaj yeem siv ncaj qha los ua qhov ntsuas ntsuas qhov ntsuas, thiab qhov kev tawm tsam tsis sib haum yog txuas nrog lub substrate hauv daim ntawv ntawm tus choj. Thaum lub substrate yog deformed los ntawm ib tug sab nraud quab yuam, qhov kev tiv thaiv qhov tseem ceeb yuav hloov, thiab tus choj yuav tsim ib tug coj unbalanced tso zis.
Cov substrate (los yog diaphragm) cov ntaub ntawv siv los ua piezoresistive sensors yog cov silicon wafers thiab germanium wafers, thiab silicon piezoresistive sensors ua los ntawm silicon wafers raws li cov ntaub ntawv rhiab heev tau nyiam ntau thiab ntau xim, tshwj xeeb tshaj yog rau solid-state piezoresistive sensors uas ntsuas siab thiab tshaj tawm.
RTD
Kev ntsuas kub tsis kam yog ua raws li qhov tseeb tias qhov kev tiv thaiv ntawm cov hlau conductor nce nrog qhov kub thiab txias. Thermal resistance feem ntau yog ua los ntawm cov khoom siv hlau ntshiab, nrog platinum thiab tooj liab yog siv dav tshaj plaws, thiab cov ntaub ntawv xws li npib tsib xee, manganese, thiab rhodium tau pib siv los ua thermal resistances.
RTD sensors ntsuas qhov ntsuas kub thiab ntsuas qhov ntsuas kub los ntawm kev siv qhov tseeb tias tus nqi kuj hloov pauv nrog qhov kub thiab txias. Qhov no sensor yog tsim nyog rau lub sij hawm uas qhov ntsuas kub kom paub tseeb yog yuav tsum tau. Cov ntaub ntawv RTD ntau dua yog platinum, tooj liab, npib tsib xee, thiab lwm yam, uas muaj cov yam ntxwv ntawm qhov kub thiab txias coefficient ntawm kev ua haujlwm, zoo linearity, kev ua haujlwm ruaj khov, qhov kub thiab txias ntau thiab ua haujlwm yooj yim. Nws yog siv los ntsuas qhov kub thiab txias hauv thaj tsam ntawm -200 degree ~ +500 degree .